| Thickness-Dependent Thermal, Optical and Electrical
Phase Transition in Electron-Beam Deposited VO2
Films |
Subrata Saha,a,# Iman Biswas,a
Arjun Dey,b
Gunjan Rastogi,b
Aniruddha Mondala,* and
Arka Deya,#
Pages : 196-206
DOI: 10.1080/0371750X.2025.2527590 |
| Abstract |
| Vanadium dioxide (VO2
) films exhibit excellent thermochromic behaviour, altering its
thermal, optical and electrical properties near 68oC through a phase transition. This
study explores how film thickness impacts these characteristics across transition
temperature (c
), providing new insights into its semiconductor-metal transition (SMT).
VO2
films were fabricated on quartz substrates via electron-beam evaporation followed
by precise oxygen annealing. Differential scanning calorimetry (DSC) confirmed the
phase transition through observable endothermic peaks. DSC data showed a drop of
c
from nearly 67o
to 64oC. Optical measurements showed a thickness-dependent c
,
decreasing from nearly 67o
to 56oC, while electrical measurements showcased a similar
trend from nearly 63o
to 55oC, with decreasing thickness of the films. Capacitance
studies further revealed increased charge carrier generation during the SMT,
highlighting thickness as a crucial factor in optimizing VO2
for smart material specific
applications.
[Keywords: Vanadium dioxide films, Semiconductor-metal transition, Transition
temperature modulation, Thermal, optical and electrical switching, Thickness effect] |
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